Invention Grant
US08388410B2 RFID-containing carriers used for silicon wafer quality 有权
用于硅晶片质量的含RFID载体

RFID-containing carriers used for silicon wafer quality
Abstract:
A carrier configured for use in a lapping machine includes a body having a first opening for carrying a work piece during operation of the lapping machine. A device is arranged and disposed in the body. The device is configured to retain information readable by a reading device for identifying the body.
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