An apparatus for material processing by laser radiation, including a laser source which emits a processing beam, and a beam path for focusing and scanning, the beam path focusing the processing beam into a processing volume and shifting the position of the focus therein. A beam splitting device generates several foci in the processing volume and the beam splitting device splits the processing beam up into a primary beam and at least one secondary beam and leaves the cross section of the beam in a pupil plane of the beam path unchanged during said division and introduces an angle of separation between the primary and secondary beams, so that these beams expand in the beam path in directions which differ by the angle of separation.