Invention Grant
US08389054B2 Fabrication technique for metallic devices with embedded optical elements, optical devices, or optical and electrical feedthroughs
有权
具有嵌入式光学元件，光学器件或光学和电气馈通的金属器件的制造技术
- Patent Title: Fabrication technique for metallic devices with embedded optical elements, optical devices, or optical and electrical feedthroughs
- Patent Title (中): 具有嵌入式光学元件，光学器件或光学和电气馈通的金属器件的制造技术
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Application No.: US12191908Application Date: 2008-08-14
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Publication No.: US08389054B2Publication Date: 2013-03-05
- Inventor: Dan Eugen Angelescu , Robert J. Schroeder
- Applicant: Dan Eugen Angelescu , Robert J. Schroeder
- Applicant Address: US TX Sugar Land
- Assignee: Schlumberger Technology Corporation
- Current Assignee: Schlumberger Technology Corporation
- Current Assignee Address: US TX Sugar Land
- Agent Jakub M. Michna; Rachel E. Greene; Brigid M. Laffey
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
Methods and related systems for fabricating a device or a part, the method including the step of growing at least one material from a vapor phase, by a CVD process, for example a MO-CVD process, on a heated base substrate, wherein the at least one material conforms to one of at least one topographical pattern of the base substrate, one or more predefined geometrical shape on the base substrate or both. The method includes removing the base substrate embedded in the CVD deposited material, as well as optionally machining a portion of the CVD deposited material.
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