Invention Grant
- Patent Title: Positive resist composition and pattern forming process
- Patent Title (中): 正抗蚀剂组成和图案形成工艺
-
Application No.: US12786013Application Date: 2010-05-24
-
Publication No.: US08389201B2Publication Date: 2013-03-05
- Inventor: Akinobu Tanaka , Keiichi Masunaga , Daisuke Domon , Satoshi Watanabe
- Applicant: Akinobu Tanaka , Keiichi Masunaga , Daisuke Domon , Satoshi Watanabe
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2009-156784 20090701
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30

Abstract:
The present invention relates to a positive resist composition and to a pattern forming process using the same. The present invention provides: a positive resist composition having an enhanced etching resistance and an excellent resolution and being capable of providing an excellent pattern profile even at a substrate-side boundary face of resist, in photolithography for fine processing, and particularly in lithography adopting, as an exposure source, KrF laser, extreme ultraviolet rays, electron beam, X-rays, or the like; and a pattern forming process utilizing the positive resist composition.
Public/Granted literature
- US20110003251A1 POSITIVE RESIST COMPOSITION AND PATTERN FORMING PROCESS Public/Granted day:2011-01-06
Information query
IPC分类: