Invention Grant
US08389320B2 Method for fracturing semiconductor substrate, method for fracturing solar cell, and the solar cell 有权
破碎半导体衬底的方法,压裂太阳能电池的方法和太阳能电池

Method for fracturing semiconductor substrate, method for fracturing solar cell, and the solar cell
Abstract:
In accordance with the present invention, the dividing grooves 8 are formed so as not to be parallel to cleavage planes of the semiconductor substrate 1, and the semiconductor substrate 1 is bent along the dividing grooves 8, whereby the semiconductor substrate 1 is fractured along the dividing grooves 8.
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