Invention Grant
US08389374B1 Method for producing a microfabricated in-plane radio frequency (RF) capacitor
有权
用于制造微制造的面内射频(RF)电容器的方法
- Patent Title: Method for producing a microfabricated in-plane radio frequency (RF) capacitor
- Patent Title (中): 用于制造微制造的面内射频(RF)电容器的方法
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Application No.: US12860259Application Date: 2010-08-20
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Publication No.: US08389374B1Publication Date: 2013-03-05
- Inventor: Nathan P. Lower , Mark M. Mulbrook , Robert L. Palandech
- Applicant: Nathan P. Lower , Mark M. Mulbrook , Robert L. Palandech
- Applicant Address: US IA Cedar Rapids
- Assignee: Rockwell Collins, Inc.
- Current Assignee: Rockwell Collins, Inc.
- Current Assignee Address: US IA Cedar Rapids
- Agent Donna P. Suchy; Daniel M. Barbieri
- Main IPC: H01L31/119
- IPC: H01L31/119 ; H01L29/00

Abstract:
The present invention is a method for producing a capacitor. The method includes applying a dielectric substance (ex.—silicon nitride) to a first gold seed layer, the first gold seed layer being formed on a wafer. A second gold seed layer is formed upon the dielectric substance and first gold seed layer. Gold is electroplated into a photoresist to form a first set of 3-D capacitor elements on the second gold seed layer. A first copper layer is electroplated onto the second gold seed layer. Gold is electroplated into a photoresist to form a second set of 3-D capacitor elements, the second set of 3-D elements being formed at least partially within the first copper layer and being connected to the first set of 3-D elements. A second copper layer is electroplated onto the first copper layer. Then, both copper layers are removed to provide (ex.—form) the capacitor.
Information query
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