Invention Grant
US08390029B2 Semiconductor device for reducing and/or preventing current collapse
有权
用于减少和/或防止电流崩溃的半导体装置
- Patent Title: Semiconductor device for reducing and/or preventing current collapse
- Patent Title (中): 用于减少和/或防止电流崩溃的半导体装置
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Application No.: US12867427Application Date: 2009-01-23
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Publication No.: US08390029B2Publication Date: 2013-03-05
- Inventor: Hidekazu Umeda , Masahiro Hikita , Tetsuzo Ueda , Tsuyoshi Tanaka , Daisuke Ueda
- Applicant: Hidekazu Umeda , Masahiro Hikita , Tetsuzo Ueda , Tsuyoshi Tanaka , Daisuke Ueda
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-074539 20080321
- International Application: PCT/JP2009/000258 WO 20090123
- International Announcement: WO2009/116223 WO 20090924
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A semiconductor device includes an undoped GaN layer (103) formed on a substrate (101), an undoped AlGaN layer (104) formed on the undoped GaN layer (103) and having a band gap energy larger than that of the undoped GaN layer (103), a p-type AlGaN layer (105) and a high-concentration p-type GaN layer (106) formed on the undoped AlGaN layer (104), and an n-type AlGaN layer (107) formed on the high-concentration p-type GaN layer (106). A gate electrode (112) which makes ohmic contact with the high-concentration p-type GaN layer (106) is formed on the high-concentration p-type GaN layer (106) in a region thereof exposed through an opening (107a) formed in the n-type AlGaN layer (107).
Public/Granted literature
- US20110012173A1 SEMICONDUCTOR DEVICE Public/Granted day:2011-01-20
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