Invention Grant
- Patent Title: MEMS switch and method of manufacturing the MEMS switch
- Patent Title (中): MEMS开关和制造MEMS开关的方法
-
Application No.: US12935282Application Date: 2009-03-30
-
Publication No.: US08390173B2Publication Date: 2013-03-05
- Inventor: Takaaki Yoshihara , Yoshiki Hayasaki , Takeo Shirai , Tomoaki Matsushima , Hiroshi Kawada , Yousuke Hagihara
- Applicant: Takaaki Yoshihara , Yoshiki Hayasaki , Takeo Shirai , Tomoaki Matsushima , Hiroshi Kawada , Yousuke Hagihara
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-093595 20080331
- International Application: PCT/JP2009/056493 WO 20090330
- International Announcement: WO2009/123111 WO 20091008
- Main IPC: H01L41/00
- IPC: H01L41/00 ; H02N1/00 ; H02N11/00

Abstract:
The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.
Public/Granted literature
- US20110024274A1 MEMS SWITCH AND METHOD OF MANUFACTURING THE MEMS SWITCH Public/Granted day:2011-02-03
Information query
IPC分类: