Invention Grant
- Patent Title: Multi-column electron beam exposure apparatus and magnetic field generation device
- Patent Title (中): 多列电子束曝光装置及磁场发生装置
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Application No.: US12928899Application Date: 2010-12-22
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Publication No.: US08390201B2Publication Date: 2013-03-05
- Inventor: Hiroshi Yasuda , Yoshihisa Ooae , Takeshi Haraguchi
- Applicant: Hiroshi Yasuda , Yoshihisa Ooae , Takeshi Haraguchi
- Applicant Address: JP Tokyo
- Assignee: Advantest Corp.
- Current Assignee: Advantest Corp.
- Current Assignee Address: JP Tokyo
- Agency: Muramatsu & Associates
- Main IPC: H01J25/50
- IPC: H01J25/50

Abstract:
A multi-column electron beam exposure apparatus includes: multiple column cells; an electron beam converging unit in which two annular permanent magnets and electromagnetic coils are surrounded by a ferromagnetic frame, the two annular permanent magnets being magnetized in an optical axis direction and symmetrical about the optical axis, where the electromagnetic coils adjust magnetic fields of the annular permanent magnets; and a substrate provided with circular apertures through which electron beams used in the column cells pass, respectively, where the electron beam converging unit is disposed in each of the circular apertures. The two annular permanent magnets may be disposed one above the other in the optical axis direction, and the electromagnetic coils may be provided inside or outside the annular permanent magnets in their radial direction.
Public/Granted literature
- US20110148297A1 Multi-column electron beam exposure apparatus and magnetic field generation device Public/Granted day:2011-06-23
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