Invention Grant
US08390784B2 Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure method 有权
反射折射投影物镜,瞳孔镜,投影曝光装置和投影曝光方法

  • Patent Title: Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure method
  • Patent Title (中): 反射折射投影物镜,瞳孔镜,投影曝光装置和投影曝光方法
  • Application No.: US12369460
    Application Date: 2009-02-11
  • Publication No.: US08390784B2
    Publication Date: 2013-03-05
  • Inventor: Alexander Epple
  • Applicant: Alexander Epple
  • Applicant Address: DE Oberkochen
  • Assignee: Carl Zeiss SMT GmbH
  • Current Assignee: Carl Zeiss SMT GmbH
  • Current Assignee Address: DE Oberkochen
  • Agency: Fish & Richardson P.C.
  • Priority: EP06016914 20060814
  • Main IPC: G03B27/54
  • IPC: G03B27/54
Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure method
Abstract:
In certain aspects, catadioptric projection objectives for imaging a pattern from an object field arranged in an object surface of the projection objective onto an image field arranged in an image surface of the projection objective include a first objective part configured to image the pattern from the object surface into a first intermediate image, and having a first pupil surface, a second objective part configured to image the first intermediate image into a second intermediate image, and having a second pupil surface optically conjugate to the first pupil surface, and a third objective part configured to image the second intermediate image into the image surface, and having a third pupil surface optically conjugate to the first and second pupil surface. A pupil mirror having a reflective pupil mirror surface is positioned at or close to one of the first, second and third pupil surface. A pupil mirror manipulator operatively connected to the pupil mirror and configured to vary the shape of the reflective surface of the pupil mirror allows for dynamically correcting imaging aberrations originating from lens heating, compaction and other radiation induced imaging aberrations occurring during operation of the projection objective.
Information query
Patent Agency Ranking
0/0