Invention Grant
- Patent Title: Auto device skew manufacturing
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Application No.: US12797392Application Date: 2010-06-09
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Publication No.: US08391999B2Publication Date: 2013-03-05
- Inventor: Jui-Long Chen , Hui-Yun Chao , Chia-Tong Ho
- Applicant: Jui-Long Chen , Hui-Yun Chao , Chia-Tong Ho
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: D06F19/00
- IPC: D06F19/00

Abstract:
A system and method for manufacturing semiconductor devices is disclosed. An embodiment comprises using desired device parameters to choose an initial manufacturing recipe. Once chosen, the initial manufacturing recipe may be modified by determining and applying an offset adjustment based on previous manufacturing to tune the recipes for the particular equipment to be utilized in the manufacturing process.
Public/Granted literature
- US20110307088A1 Auto Device Skew Manufacturing Public/Granted day:2011-12-15
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