Invention Grant
US08393210B2 Rotation sensing apparatus and methods 有权
旋转传感装置及方法

Rotation sensing apparatus and methods
Abstract:
Angular rate sensors cause a stream of fluid to flow by heating the fluid. A trajectory of the stream of fluid is deflected by Coriolis forces. Apparatus according to some embodiments provides two heaters spaced apart along a channel. A stream of gas can be made to flow along the channel by operating one of the heaters. The flow can be periodically reversed by alternating operation of the heaters. Temperature sensors may be applied to detect deflection of the flowing gas. Angular rate sensors may be fabricated inexpensively by micromachining techniques.
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