Invention Grant
- Patent Title: Micromechanical acceleration sensor having an open seismic mass
- Patent Title (中): 具有开放地震质量的微机械加速度传感器
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Application No.: US12468501Application Date: 2009-05-19
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Publication No.: US08393215B2Publication Date: 2013-03-12
- Inventor: Heiko Stahl , Dietrich Schubert , Lars Tebje
- Applicant: Heiko Stahl , Dietrich Schubert , Lars Tebje
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008002606 20080624
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A micromechanical acceleration sensor having a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, in which the seismic mass is suspended over the substrate with the help of the suspension, the seismic mass has a mass center of gravity, the suspension has at least two anchors on the substrate, the two anchors are situated on opposite sides of the mass center of gravity, the distance between the two anchors being small compared to a horizontal extension of the seismic mass, the two anchors determine a central axis, the seismic mass have recesses which are situated on opposite sides of the central axis and are laterally open outward on the sides facing away from the central axis, and the stationary electrodes at least engage in the recesses of the seismic mass.
Public/Granted literature
- US20090314085A1 MICROMECHANICAL ACCELERATION SENSOR HAVING AN OPEN SEISMIC MASS Public/Granted day:2009-12-24
Information query
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