Invention Grant
- Patent Title: CMP pad dressers with hybridized abrasive surface and related methods
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Application No.: US12255823Application Date: 2008-10-22
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Publication No.: US08393934B2Publication Date: 2013-03-12
- Inventor: Chien-Min Sung
- Applicant: Chien-Min Sung
- Agency: Thorpe North & Western LLP
- Main IPC: B24B1/00
- IPC: B24B1/00

Abstract:
A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material. A pad conditioner substrate is also provided. Each of the plurality of abrasive segments is permanently affixed to the pad conditioner substrate in an orientation that enables removal of material from a CMP pad by the abrasive layer as the pad conditioner and the CMP pad are moved relative to one another.
Public/Granted literature
- US20090093195A1 CMP Pad Dressers with Hybridized Abrasive Surface and Related Methods Public/Granted day:2009-04-09
Information query