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US08394198B2 Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof 有权
用于提升硅单晶的硅玻璃坩埚及其制造方法

Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
Abstract:
A silica glass crucible for pulling up a silicon single crystal including a wall part, a corner part and a bottom part is provided with an outer layer formed from an opaque silica glass layer which includes many bubbles, and an inner layer formed from a transparent silica glass layer which substantially does not include bubbles, wherein at least one part of an inner surface of the wall part and the corner part being an uneven surface formed with multiple damaged parts having a depth of 50 μm or more and 450 μm or less, and wherein a region among the inner surface of the bottom part within a certain range from the center of the bottom part being a smooth surface which does is substantially not formed with damage.
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