Invention Grant
- Patent Title: Susceptor ring
- Patent Title (中): 受难环
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Application No.: US12187933Application Date: 2008-08-07
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Publication No.: US08394229B2Publication Date: 2013-03-12
- Inventor: Ravinder Aggarwal , Bob Haro
- Applicant: Ravinder Aggarwal , Bob Haro
- Applicant Address: US AZ Phoenix
- Assignee: ASM America, Inc.
- Current Assignee: ASM America, Inc.
- Current Assignee Address: US AZ Phoenix
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/50 ; C23F1/00 ; H01L21/306
Abstract:
A one-piece susceptor ring for housing at least one temperature measuring device is provided. The susceptor ring includes a plate having an aperture formed therethrough and a pair of side ribs integrally connected to a lower surface of the plate. The side ribs are located on opposing sides of the aperture. The susceptor ring further includes a bore formed in each of the pair of side ribs. Each bore is configured to receive a temperature measuring device therein.
Public/Granted literature
- US20100031884A1 SUSCEPTOR RING Public/Granted day:2010-02-11
Information query
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