Invention Grant
US08394327B2 Manufacturing method for acoustic wave sensor realizing dual mode in single chip and biosensor using the same
有权
在单芯片中实现双模的声波传感器的制造方法和使用其的生物传感器
- Patent Title: Manufacturing method for acoustic wave sensor realizing dual mode in single chip and biosensor using the same
- Patent Title (中): 在单芯片中实现双模的声波传感器的制造方法和使用其的生物传感器
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Application No.: US12643519Application Date: 2009-12-21
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Publication No.: US08394327B2Publication Date: 2013-03-12
- Inventor: Sang-Hun Lee
- Applicant: Sang-Hun Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd
- Current Assignee: Samsung Electronics Co., Ltd
- Current Assignee Address: KR
- Agency: The Farrell Law Firm, P.C.
- Priority: KR10-2008-0130332 20081219
- Main IPC: G01N15/06
- IPC: G01N15/06 ; G01N33/00 ; G01N33/48

Abstract:
Disclosed is a method of realizing a dual mode acoustic wave sensor capable of being operated in both a gas environment and a liquid environment in a single chip by disposing a surface acoustic wave filter and a surface skimming bulk wave filter perpendicular to each other on the same wafer using the peculiar cut-orientation of an piezoelectric element, i.e. ST-cut quartz. An acoustic wave biosensor can realize optimum detection performance by detecting the characteristics of a detection environment and a detection target in real time during the operation of a dual mode sensor, and automatically switching between an SAW mode and an SSBW mode.
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