Invention Grant
US08394327B2 Manufacturing method for acoustic wave sensor realizing dual mode in single chip and biosensor using the same 有权
在单芯片中实现双模的声波传感器的制造方法和使用其的生物传感器

Manufacturing method for acoustic wave sensor realizing dual mode in single chip and biosensor using the same
Abstract:
Disclosed is a method of realizing a dual mode acoustic wave sensor capable of being operated in both a gas environment and a liquid environment in a single chip by disposing a surface acoustic wave filter and a surface skimming bulk wave filter perpendicular to each other on the same wafer using the peculiar cut-orientation of an piezoelectric element, i.e. ST-cut quartz. An acoustic wave biosensor can realize optimum detection performance by detecting the characteristics of a detection environment and a detection target in real time during the operation of a dual mode sensor, and automatically switching between an SAW mode and an SSBW mode.
Information query
Patent Agency Ranking
0/0