Invention Grant
- Patent Title: Methods of forming patterns
- Patent Title (中): 形成图案的方法
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Application No.: US13309442Application Date: 2011-12-01
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Publication No.: US08394579B2Publication Date: 2013-03-12
- Inventor: Scott Sills , Dan Millward
- Applicant: Scott Sills , Dan Millward
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/40

Abstract:
Some embodiments include methods of forming patterns in which a block copolymer-containing composition is formed over a substrate, and is then patterned to form a first mask. The block copolymer of the composition is subsequently induced into forming a repeating pattern within the first mask. Portions of the repeating pattern are then removed to form a second mask from the first mask. The patterning of the block copolymer-containing composition may utilize photolithography. Alternatively, the substrate may have regions which wet differently relative to one another with respect to the block copolymer-containing composition, and the patterning of the first mask may utilize such differences in wetting in forming the first mask.
Public/Granted literature
- US20120077127A1 Methods Of Forming Patterns Public/Granted day:2012-03-29
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