Invention Grant
US08394679B2 Nano-structured gasket for cold weld hermetic MEMS package and method of manufacture
有权
用于冷焊密封MEMS封装的纳米结构垫片及其制造方法
- Patent Title: Nano-structured gasket for cold weld hermetic MEMS package and method of manufacture
- Patent Title (中): 用于冷焊密封MEMS封装的纳米结构垫片及其制造方法
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Application No.: US12874212Application Date: 2010-09-01
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Publication No.: US08394679B2Publication Date: 2013-03-12
- Inventor: Mark F Eaton , Curtis Nathan Potter , Andrew Miner
- Applicant: Mark F Eaton , Curtis Nathan Potter , Andrew Miner
- Applicant Address: US TX Austin
- Assignee: Stellarray, Inc.
- Current Assignee: Stellarray, Inc.
- Current Assignee Address: US TX Austin
- Agency: Hulsey, P.C.
- Agent William N. Hulsey, III; Michele Stewart
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A structure and method for cold weld compression bonding using a metallic nano-structured gasket is provided. This structure and method allows a hermetic package to be formed at lower pressures and temperatures than are possible using bulk or conventional thin-film gasket materials.
Public/Granted literature
- US20110272796A1 Nano-structured Gasket for Cold Weld Hermetic MEMS Package and Method of Manufacture Public/Granted day:2011-11-10
Information query
IPC分类:
