Invention Grant
- Patent Title: Anti-reflective coatings for micro-fluid applications
- Patent Title (中): 用于微流体应用的抗反射涂层
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Application No.: US12847494Application Date: 2010-07-30
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Publication No.: US08394714B2Publication Date: 2013-03-12
- Inventor: Byron V. Bell
- Applicant: Byron V. Bell
- Applicant Address: US KY Lexington
- Assignee: Lexmark International, Inc.
- Current Assignee: Lexmark International, Inc.
- Current Assignee Address: US KY Lexington
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
Micro-fluid ejection heads have anti-reflective coatings. The coatings destructively interfere with light at wavelengths of interest during subsequent photo imaging processing, such as during nozzle plate imaging. Methods include determining wavelengths of photoresists. Layers are applied to the substrate and anodized. They form an oxidized layer of a predetermined thickness and reflectivity that essentially eliminates stray and scattered light during production of nozzle plates. Process conditions include voltages, biasing, lengths of time, and bathing solutions, to name a few. Tantalum and titanium oxides define further embodiments as do layer thicknesses and light wavelengths.
Public/Granted literature
- US20120026234A1 ANTI-REFLECTIVE COATINGS FOR MICRO-FLUID APPLICATIONS Public/Granted day:2012-02-02
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