Invention Grant
- Patent Title: Encoder apparatus using liquid to suppress detection failure
- Patent Title (中): 使用液体的编码器装置抑制检测失败
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Application No.: US12726023Application Date: 2010-03-17
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Publication No.: US08395110B2Publication Date: 2013-03-12
- Inventor: Susumu Makinouchi
- Applicant: Susumu Makinouchi
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2008-118443 20080430
- Main IPC: G01D5/34
- IPC: G01D5/34
Abstract:
An encoder apparatus comprises a first scale member with a scale region on which a scale is arranged; a detector that detects light from the scale region; and a retaining member with a retaining surface that is arranged so as to face a surface of the first scale member including the scale region via a predetermined gap, and that retains a liquid at least between the retaining surface and the first scale member.
Public/Granted literature
- US20100171030A1 ENCODER APPARATUS Public/Granted day:2010-07-08
Information query
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