Invention Grant
- Patent Title: Memory cell constructions
- Patent Title (中): 记忆体结构
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Application No.: US13043071Application Date: 2011-03-08
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Publication No.: US08395137B2Publication Date: 2013-03-12
- Inventor: Jun Liu , Jian Li
- Applicant: Jun Liu , Jian Li
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L21/02

Abstract:
Some embodiments include methods for fabricating memory cell constructions. A memory cell may be formed to have a programmable material directly against a material having a different coefficient of expansion than the programmable material. A retaining shell may be formed adjacent the programmable material. The memory cell may be thermally processed to increase a temperature of the memory cell to at least about 300° C., causing thermally-induced stress within the memory cell. The retaining shell may provide a stress which substantially balances the thermally-induced stress. Some embodiments include memory cell constructions. The constructions may include programmable material directly against silicon nitride that has an internal stress of less than or equal to about 200 megapascals. The constructions may also include a retaining shell silicon nitride that has an internal stress of at least about 500 megapascals.
Public/Granted literature
- US20120228573A1 Memory Cell Constructions, and Methods for Fabricating Memory Cell Constructions Public/Granted day:2012-09-13
Information query
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