Invention Grant
- Patent Title: 1T1R resistive memory device and fabrication method thereof
- Patent Title (中): 1T1R电阻式存储器件及其制造方法
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Application No.: US13311576Application Date: 2011-12-06
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Publication No.: US08395139B1Publication Date: 2013-03-12
- Inventor: Hsin-Jung Ho , Chang-Rong Wu , Wei-Chia Chen
- Applicant: Hsin-Jung Ho , Chang-Rong Wu , Wei-Chia Chen
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
A memory structure includes an active area surrounded by first isolation trenches and second isolation trenches; a bit line trench recessed into the active area of the semiconductor substrate; a word line trench recessed into the active area of the semiconductor substrate and being shallower than the bit line trench. The bit line trench and the word line trench together divide the active area into four pillar-shaped sub-regions. A bit line is embedded in the bit line trench. A word line is embedded in the word line trench. A vertical transistor is built in each of the pillar-shaped sub-regions. A resistive memory element is electrically coupled to the vertical transistor.
Information query
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