Invention Grant
- Patent Title: Semiconductor device that uses a transistor for field shield
- Patent Title (中): 使用场屏蔽晶体管的半导体器件
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Application No.: US13183963Application Date: 2011-07-15
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Publication No.: US08395198B2Publication Date: 2013-03-12
- Inventor: Hiroyuki Uchiyama
- Applicant: Hiroyuki Uchiyama
- Applicant Address: JP Tokyo
- Assignee: Elpida Memory, Inc.
- Current Assignee: Elpida Memory, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Young & Thompson
- Priority: JP2010-160981 20100715; JP2011-095621 20110422
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94

Abstract:
A semiconductor device includes: a cell gate trench with a bottom face and first/second side faces; a field-shield gate trench narrower than the cell gate trench; a first upper diffusion layer between the cell gate trench and the field-shield gate trench; a second upper diffusion layer on the opposite side of the cell gate trench from the first upper diffusion layer; a third upper diffusion layer on the opposite side of the field-shield gate trench from the first upper diffusion layer; a lower diffusion layer on the bottom face of the cell gate trench; first and second storage elements electrically connected to the first and second upper diffusion layers, respectively; a bit line electrically connected to the lower diffusion layer; a word line covering first and second side faces via a gate insulating film; and a field-shield gate electrode in the field-shield gate trench via a gate insulating film.
Public/Granted literature
- US20120012927A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-01-19
Information query
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