Invention Grant
- Patent Title: MEMS device having a movable electrode
- Patent Title (中): 具有可移动电极的MEMS器件
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Application No.: US13344964Application Date: 2012-01-06
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Publication No.: US08395227B2Publication Date: 2013-03-12
- Inventor: Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
- Applicant: Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2006-289063 20061024; JP2007-184020 20070713
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/00
Abstract:
A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
Public/Granted literature
- US20120104519A1 MEMS DEVICE HAVING A MOVABLE ELECTRODE Public/Granted day:2012-05-03
Information query
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