Invention Grant
US08395238B2 Method of manufacturing semiconductor device, and semiconductor device 失效
制造半导体器件的方法和半导体器件

Method of manufacturing semiconductor device, and semiconductor device
Abstract:
A semiconductor device including a substrate, and an insulating film formed over the substrate, wherein the insulating film has a first contact having a rectangular geometry in a plan view, and second to fifth contacts provided respectively adjacent to the individual edges of the rectangular first contact, formed therein.
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