Invention Grant
US08395240B2 Bond pad for low K dielectric materials and method for manufacture for semiconductor devices
有权
用于低K电介质材料的焊盘和半导体器件的制造方法
- Patent Title: Bond pad for low K dielectric materials and method for manufacture for semiconductor devices
- Patent Title (中): 用于低K电介质材料的焊盘和半导体器件的制造方法
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Application No.: US13274246Application Date: 2011-10-14
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Publication No.: US08395240B2Publication Date: 2013-03-12
- Inventor: Xian J. Ning
- Applicant: Xian J. Ning
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN200510111133 20051130
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
A method for manufacturing a semiconductor device having improved contact structure includes providing a semiconductor substrate, forming a plurality of gate structures formed on a portion of the substrate, forming an interlayer dielectric layer overlying the gate structures, and forming a first copper interconnect layer overlying the substantially flat surface region of the interlayer dielectric layer. The method further includes forming a dielectric layer overlying the first copper interconnect layer, forming a second copper interconnect layer overlying the dielectric layer, and providing a copper ring structure enclosing an entirety of an inner region of the dielectric layer, the copper ring structure being provided between the first copper interconnect layer and the second copper interconnect layer to maintain the inner region of the dielectric layer. In addition, the method includes forming a bonding pad structure overlying a region within the inner region of the dielectric layer.
Public/Granted literature
- US20120034771A1 BOND PAD FOR LOW K DIELECTRIC MATERIALS AND METHOD FOR MANUFACTURE FOR SEMICONDUCTOR DEVICES Public/Granted day:2012-02-09
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