Invention Grant
- Patent Title: Through-substrate via and redistribution layer with metal paste
- Patent Title (中): 通过衬底通孔和再分配层与金属膏
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Application No.: US13126286Application Date: 2009-10-21
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Publication No.: US08395267B2Publication Date: 2013-03-12
- Inventor: Freddy Roozeboom , Eric Cornelis Egbertus Van Grunsven , Franciscus Hubertus Marie Sanders , Maria Mathea Antonetta Burghoorn
- Applicant: Freddy Roozeboom , Eric Cornelis Egbertus Van Grunsven , Franciscus Hubertus Marie Sanders , Maria Mathea Antonetta Burghoorn
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP08167954 20081030
- International Application: PCT/IB2009/054641 WO 20091021
- International Announcement: WO2010/049852 WO 20100506
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device and a method for manufacturing such semiconductor device for use in a stacked configuration of the semiconductor device are disclosed. The semiconductor device includes a substrate including at least part of an electronic circuit provided at a first side thereof. The substrate includes a passivation layer and a substrate via that extends from the first side to a via depth such that it is reconfigurable into a through-substrate. The semiconductor device further includes a patterned masking layer on the first side of the substrate. The patterned masking layer includes a trench extending fully through the patterned masking layer. The trench has been filled with a redistribution conductor. The substrate via and the redistribution conductor include metal paste and together form one piece, such that there is no physical interface between the through-substrate via and the redistribution conductor. Thus, the parasitic resistance of this electrical connection is reduced.
Public/Granted literature
- US20110210452A1 THROUGH-SUBSTRATE VIA AND REDISTRIBUTION LAYER WITH METAL PASTE Public/Granted day:2011-09-01
Information query
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