Invention Grant
- Patent Title: Microlithographic projection exposure apparatus
- Patent Title (中): 微光刻投影曝光装置
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Application No.: US12884485Application Date: 2010-09-17
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Publication No.: US08395753B2Publication Date: 2013-03-12
- Inventor: Damian Fiolka , Michael Totzeck , Alexandra Pazidis , Michael Ricker
- Applicant: Damian Fiolka , Michael Totzeck , Alexandra Pazidis , Michael Ricker
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007033773 20070718
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/54

Abstract:
The disclosure relates to a microlithographic projection exposure apparatus, as well as related components and methods. In some embodiments, a microlithographic projection exposure apparatus includes an illumination system and a projection objective, where the illumination system can illuminate an object plane of the projection objective and the projection objective can produce the image of the object plane on an image plane. A polarization-dependent transmission can be produced in the illumination system such that, for at least one polarization distribution in respect of the light impinging on the object plane, a non-homogeneous intensity distribution in the object plane is obtained. The non-homogeneous intensity distribution can afford a homogeneous intensity distribution in the image plane by virtue of polarization-dependent transmission properties of the projection objective.
Public/Granted literature
- US20110007293A1 MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2011-01-13
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