Invention Grant
- Patent Title: High-speed electrostatic actuation of MEMS-based devices
- Patent Title (中): 基于MEMS的器件的高速静电驱动
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Application No.: US12370356Application Date: 2009-02-12
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Publication No.: US08395877B2Publication Date: 2013-03-12
- Inventor: Charalampos Pozidis , Angeliki Pantazi , Abu Sebastian , Deepak Ranjan Sahoo
- Applicant: Charalampos Pozidis , Angeliki Pantazi , Abu Sebastian , Deepak Ranjan Sahoo
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Anne V. Dougherty
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/02
Abstract:
A micro-electro mechanical device includes a first structure, a second structure offset from the first structure by a gap. The first structure is configured to be electrostatically actuated to deflect relative to second structure. A pulse generator is configured to combine at least two different pulses to electrostatically drive at least one of the first structure and the second structure between an initial position and a final position.
Public/Granted literature
- US20100201289A1 HIGH-SPEED ELECTROSTATIC ACTUATION OF MEMS-BASED DEVICES Public/Granted day:2010-08-12
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