Invention Grant
US08396582B2 Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
有权
用于自学习和自我改进的半导体制造工具的方法和装置
- Patent Title: Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
- Patent Title (中): 用于自学习和自我改进的半导体制造工具的方法和装置
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Application No.: US12697121Application Date: 2010-01-29
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Publication No.: US08396582B2Publication Date: 2013-03-12
- Inventor: Sanjeev Kaushal , Sukesh Janubhai Patel , Kenji Sugishima
- Applicant: Sanjeev Kaushal , Sukesh Janubhai Patel , Kenji Sugishima
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Turocy & Watson, LLP
- Main IPC: G06F15/18
- IPC: G06F15/18 ; G06N3/08 ; G06N3/12

Abstract:
System(s) and method(s) for optimizing performance of a manufacturing tool are provided. Optimization relies on recipe drifting and generation of knowledge that capture relationships among product output metrics and input material measurement(s) and recipe parameters. Optimized recipe parameters are extracted from a basis of learned functions that predict output metrics for a current state of the manufacturing tool and measurements of input material(s). Drifting and learning are related and lead to dynamic optimization of tool performance, which enables optimized output from the manufacturing tool as the operation conditions of the tool changes. Features of recipe drifting and associated learning can be autonomously or externally configured through suitable user interfaces, which also can be drifted to optimize end-user interaction.
Public/Granted literature
- US20100138026A1 METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICONDUCTOR MANUFACTURING TOOL Public/Granted day:2010-06-03
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