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US08397359B2 Method of manufacturing a drop generator 有权
液滴发生器的制造方法

Method of manufacturing a drop generator
Abstract:
A method for making a plurality of electromechanical transducers includes, depositing a layer of conductive material attached to a first side of a piezoelectric layer to form a laminar structure, attaching the laminar structure to a rigid carrier substrate using a removable double-sided tape, forming piezoelectric transducers, attaching the electromechanical transducer to a fluid channel substructure, and removing the rigid carrier substrate and the double-sided tape.
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