Invention Grant
- Patent Title: Chemical liquid supplying apparatus
- Patent Title (中): 化学液体供给装置
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Application No.: US13225927Application Date: 2011-09-06
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Publication No.: US08398379B2Publication Date: 2013-03-19
- Inventor: Takeo Yajima
- Applicant: Takeo Yajima
- Applicant Address: JP Tokyo
- Assignee: Koganei Corporation
- Current Assignee: Koganei Corporation
- Current Assignee Address: JP Tokyo
- Agency: McCormick, Paulding & Huber LLP
- Priority: JP2006-283555 20061018
- Main IPC: F04B35/02
- IPC: F04B35/02 ; F04B9/08

Abstract:
A chemical liquid supplying apparatus which can discharge chemical liquid with high accuracy is provided. The apparatus is used to discharge the chemical liquid in a chemical liquid tank from an application nozzle. The apparatus has a combined member formed integrally with a pump case and a cylinder, and a flexible tube serving as a pump member is provided in the pump case, wherein its inside is a pump chamber and its outside is a pump-side driving chamber. A piston is assembled to the cylinder and when the piston is reciprocated by a motor, the pump chamber is expanded and contracted. A gap between the piston and the cylinder is covered with a diaphragm, and an interior of the diaphragm is a seal space. Therefore, an incompressible medium having leaked from the gap between the piston and the cylinder enters into the seal space and does not leak to the outside.
Public/Granted literature
- US20110318206A1 Chemical Liquid Supplying Apparatus Public/Granted day:2011-12-29
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