Invention Grant
- Patent Title: Electrode and arrangement with movable shield
- Patent Title (中): 电极和可移动屏蔽的布置
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Application No.: US11937137Application Date: 2007-11-08
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Publication No.: US08398775B2Publication Date: 2013-03-19
- Inventor: Frank Stahr , Ulf Stephan , Olaff Steinke , Klaus Schade
- Applicant: Frank Stahr , Ulf Stephan , Olaff Steinke , Klaus Schade
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: WOPCT/EP2007/062084 20071108
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/00 ; C23F1/00 ; H01L21/306
Abstract:
The present invention comprises an electrode arrangement for a coating device with a stationary first electrode (3) and a second movable electrode (18), whose principle surfaces are opposing each other during coating, wherein the second electrode (18) may be moved along a plane parallel to the opposing principle surfaces, wherein at least one end face of an electrode running transversely to the principal surface an electrical shield (12, 19, 13) is provided, which extends at least partially parallel to the end face of one electrode, wherein at least one part (14) of the shield is formed so as to be movable.
Public/Granted literature
- US20090121604A1 ELECTRODE AND ARRANGEMENT WITH MOVABLE SHIELD Public/Granted day:2009-05-14
Information query
IPC分类:
