Invention Grant
- Patent Title: Target utilization improvement for rotatable magnetrons
- Patent Title (中): 可旋转磁控管的目标利用率提高
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Application No.: US12753814Application Date: 2010-04-02
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Publication No.: US08398834B2Publication Date: 2013-03-19
- Inventor: Dennis R. Hollars
- Applicant: Dennis R. Hollars
- Applicant Address: US CA Milpitas
- Assignee: Nuvosun, Inc.
- Current Assignee: Nuvosun, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Wilson Sonsini Goodrich & Rosati
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
Rotatable magnetron sputtering apparatuses are described for depositing material from a target while reducing premature burn through issues. The rotatable magnetron sputtering apparatus includes electric coils wound on pole pieces to modulate the magnetic fields at the ends of the magnetron magnetic assembly. Changing the direction of electric current moves the sputtering region alternately around its normal central position to decrease the rate of erosion depth at the ends of the target material.
Public/Granted literature
- US20110240468A1 TARGET UTILIZATION IMPROVEMENT FOR ROTATABLE MAGNETRONS Public/Granted day:2011-10-06
Information query
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