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US08398834B2 Target utilization improvement for rotatable magnetrons 有权
可旋转磁控管的目标利用率提高

Target utilization improvement for rotatable magnetrons
Abstract:
Rotatable magnetron sputtering apparatuses are described for depositing material from a target while reducing premature burn through issues. The rotatable magnetron sputtering apparatus includes electric coils wound on pole pieces to modulate the magnetic fields at the ends of the magnetron magnetic assembly. Changing the direction of electric current moves the sputtering region alternately around its normal central position to decrease the rate of erosion depth at the ends of the target material.
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