Invention Grant
- Patent Title: Cavity structure comprising an adhesion interface composed of getter material
- Patent Title (中): 腔结构包括由吸气材料组成的粘合界面
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Application No.: US12899077Application Date: 2010-10-06
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Publication No.: US08399299B2Publication Date: 2013-03-19
- Inventor: Xavier Baillin
- Applicant: Xavier Baillin
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0956999 20091007
- Main IPC: H01L21/44
- IPC: H01L21/44
Abstract:
A method for making a structure including at least the steps of: making at least one first portion of at least one getter material against a first substrate or a second substrate, making at least one second portion of at least one getter material against the second substrate when the first portion of getter material is placed against the first substrate, or against the first substrate when the first portion of getter material is placed against the second substrate, and attaching the second substrate to the first substrate by thermocompression of a first part of the first portion of getter material against at least one part of the second portion of getter material, forming at least one cavity delimited by the first substrate and the second substrate, a second part of the first portion of getter material being placed in the cavity.
Public/Granted literature
- US20110079889A1 CAVITY STRUCTURE COMPRISING AN ADHESION INTERFACE COMPOSED OF GETTER MATERIAL Public/Granted day:2011-04-07
Information query
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