Invention Grant
US08399323B2 Method for fabricating vertical channel type nonvolatile memory device 有权
垂直通道型非易失性存储器件的制造方法

Method for fabricating vertical channel type nonvolatile memory device
Abstract:
A method for fabricating a vertical channel type nonvolatile memory device includes: stacking a plurality of interlayer insulating layers and a plurality of gate electrode conductive layers alternately over a substrate; etching the interlayer insulating layers and the gate electrode conductive layers to form a channel trench exposing the substrate; forming an undoped first channel layer over the resulting structure including the channel trench; doping the first channel layer with impurities through a plasma doping process; and filling the channel trench with a second channel layer.
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