Invention Grant
US08399323B2 Method for fabricating vertical channel type nonvolatile memory device
有权
垂直通道型非易失性存储器件的制造方法
- Patent Title: Method for fabricating vertical channel type nonvolatile memory device
- Patent Title (中): 垂直通道型非易失性存储器件的制造方法
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Application No.: US13244247Application Date: 2011-09-23
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Publication No.: US08399323B2Publication Date: 2013-03-19
- Inventor: Ki-Hong Lee , Moon-Sig Joo , Kwon Hong , Sun-Hwan Hwang
- Applicant: Ki-Hong Lee , Moon-Sig Joo , Kwon Hong , Sun-Hwan Hwang
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2009-0052159 20090612
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for fabricating a vertical channel type nonvolatile memory device includes: stacking a plurality of interlayer insulating layers and a plurality of gate electrode conductive layers alternately over a substrate; etching the interlayer insulating layers and the gate electrode conductive layers to form a channel trench exposing the substrate; forming an undoped first channel layer over the resulting structure including the channel trench; doping the first channel layer with impurities through a plasma doping process; and filling the channel trench with a second channel layer.
Public/Granted literature
- US20120021574A1 METHOD FOR FABRICATING VERTICAL CHANNEL TYPE NONVOLATILE MEMORY DEVICE Public/Granted day:2012-01-26
Information query
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