Invention Grant
- Patent Title: Laser processing for high-efficiency thin crystalline silicon solar cell fabrication
- Patent Title (中): 高效薄晶硅太阳能电池制造的激光加工
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Application No.: US13118295Application Date: 2011-05-27
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Publication No.: US08399331B2Publication Date: 2013-03-19
- Inventor: Mehrdad M. Moslehi , Virendra V. Rana , JianJun Liang , Pranav Anbalagan
- Applicant: Mehrdad M. Moslehi , Virendra V. Rana , JianJun Liang , Pranav Anbalagan
- Applicant Address: US CA Milpitas
- Assignee: Solexel
- Current Assignee: Solexel
- Current Assignee Address: US CA Milpitas
- Agency: Hulsey, P.C.
- Agent William N. Hulsey, III; John Ryan C. Wood
- Main IPC: H01L21/8222
- IPC: H01L21/8222

Abstract:
Laser processing schemes are disclosed for producing various types of hetero-junction and homo-junction solar cells. The methods include base and emitter contact opening, selective doping, and metal ablation. Also, laser processing schemes are disclosed that are suitable for selective amorphous silicon ablation and selective doping for hetero-junction solar cells. These laser processing techniques may be applied to semiconductor substrates, including crystalline silicon substrates, and further including crystalline silicon substrates which are manufactured either through wire saw wafering methods or via epitaxial deposition processes, that are either planar or textured/three-dimensional. These techniques are highly suited to thin crystalline semiconductor, including thin crystalline silicon films.
Public/Granted literature
- US20120028399A1 LASER PROCESSING FOR HIGH-EFFICIENCY THIN CRYSTALLINE SILICON SOLAR CELL FABRICATION Public/Granted day:2012-02-02
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