Invention Grant
- Patent Title: Apparatus for forming a film and an electroluminescence device
- Patent Title (中): 用于形成膜和电致发光器件的装置
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Application No.: US13252254Application Date: 2011-10-04
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Publication No.: US08399362B2Publication Date: 2013-03-19
- Inventor: Shunpei Yamazaki , Hideaki Kuwabara
- Applicant: Shunpei Yamazaki , Hideaki Kuwabara
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2003-121313 20030425
- Main IPC: H01L21/31
- IPC: H01L21/31
Abstract:
A device having three evaporation sources and a unit for moving the respective evaporation sources in one chamber is used, whereby it becomes possible to increase efficiency of use of an evaporation material. Consequently, manufacturing cost can be reduced, and a uniform thickness can be obtained over an entire surface of a substrate even in the case in which a large area substrate is used.
Public/Granted literature
- US20120021548A1 Apparatus For Forming A Film And An Electroluminescence Device Public/Granted day:2012-01-26
Information query
IPC分类:
