Invention Grant
- Patent Title: Scanning electron microscope and CD measurement calibration standard specimen
- Patent Title (中): 扫描电子显微镜和CD测量校准标准样品
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Application No.: US12216136Application Date: 2008-06-30
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Publication No.: US08399832B2Publication Date: 2013-03-19
- Inventor: Takeshi Mizuno , Hiroki Kawada
- Applicant: Takeshi Mizuno , Hiroki Kawada
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies
- Current Assignee: Hitachi High-Technologies
- Current Assignee Address: JP Tokyo
- Priority: JP2004-188495 20040625
- Main IPC: G01N23/04
- IPC: G01N23/04
Abstract:
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.
Public/Granted literature
- US20080272297A1 Scanning electron microscope and CD measurement calibration standard specimen Public/Granted day:2008-11-06
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