Invention Grant
US08400643B2 Displacement sensor using multiple position sensitive photodetectors
有权
位移传感器使用多个位置敏感光电探测器
- Patent Title: Displacement sensor using multiple position sensitive photodetectors
- Patent Title (中): 位移传感器使用多个位置敏感光电探测器
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Application No.: US13088267Application Date: 2011-04-15
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Publication No.: US08400643B2Publication Date: 2013-03-19
- Inventor: Kim Atherton
- Applicant: Kim Atherton
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
A position sensing device having a high range to resolution ratio comprises a light source arrangement, a moving aperture arrangement and a multiple position sensitive detector (PSD) arrangement. The multiple PSD arrangement comprises a plurality of position sensitive detectors arranged along at least two detection tracks along a measuring axis. Each of the plurality of position sensitive detectors shares a common portion of a total measuring range along the measuring axis with an adjacent position sensitive detector which is on a different detector track. The total measurement range is larger than the detector range of each of the position sensitive detectors.
Public/Granted literature
- US20120262733A1 DISPLACEMENT SENSOR USING MULTIPLE POSITION SENSITIVE PHOTODETECTORS Public/Granted day:2012-10-18
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