Invention Grant
- Patent Title: Pressure difference measuring cell
- Patent Title (中): 压力差测量单元
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Application No.: US12735098Application Date: 2008-12-12
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Publication No.: US08402836B2Publication Date: 2013-03-26
- Inventor: Wolfgang Dannhauer , Michael Philipps , Friedrich Schwabe , Dieter Stolze , Anh Tuan Tham
- Applicant: Wolfgang Dannhauer , Michael Philipps , Friedrich Schwabe , Dieter Stolze , Anh Tuan Tham
- Applicant Address: DE Maulburg
- Assignee: Endress + Hauser GmbH + Co. KG
- Current Assignee: Endress + Hauser GmbH + Co. KG
- Current Assignee Address: DE Maulburg
- Agency: Bacon & Thomas, PLLC
- Priority: DE102007061184 20071217
- International Application: PCT/EP2008/067369 WO 20081212
- International Announcement: WO2009/077433 WO 20090625
- Main IPC: G01L13/02
- IPC: G01L13/02

Abstract:
A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.
Public/Granted literature
- US20100281992A1 PRESSURE DIFFERENCE MEASURING CELL Public/Granted day:2010-11-11
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