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US08404206B2 Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls 有权
用于生产多晶硅的方法,其减少硅在反应器壁上的沉积

Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls
Abstract:
Gas distribution units of fluidized bed reactors are configured to direct thermally decomposable compounds to the center portion of the reactor and away from the reactor wall to prevent deposition of material on the reactor wall and process for producing polycrystalline silicon product in a reactor that reduce the amount of silicon which deposits on the reactor wall.
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