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US08404543B2 Method for fabricating semiconductor device with buried gate 有权
具有埋栅的半导体器件的制造方法

Method for fabricating semiconductor device with buried gate
Abstract:
A method for fabricating a semiconductor device with a buried gate includes: etching a substrate to form a plurality of trenches; forming a plurality of buried gates that fill lower portions of the trenches; forming a plurality of sealing layers that gap-fill upper portions of the trenches and have protrusions higher than a top surface of the substrate; forming an inter-layer insulation layer over the whole surface of the substrate including the sealing layers; and etching the inter-layer insulation layer to form a contact hole that is aligned with a space between the protrusions of the sealing layers.
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