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US08404574B2 Method for manufacturing silicon carbide semiconductor device 有权
碳化硅半导体器件的制造方法

  • Patent Title: Method for manufacturing silicon carbide semiconductor device
  • Patent Title (中): 碳化硅半导体器件的制造方法
  • Application No.: US13142147
    Application Date: 2009-10-26
  • Publication No.: US08404574B2
    Publication Date: 2013-03-26
  • Inventor: Takashi Masuda
  • Applicant: Takashi Masuda
  • Applicant Address: JP Tokyo
  • Assignee: Showa Denko K.K.
  • Current Assignee: Showa Denko K.K.
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2008-333659 20081226
  • International Application: PCT/JP2009/005645 WO 20091026
  • International Announcement: WO2010/073455 WO 20100701
  • Main IPC: H01L21/283
  • IPC: H01L21/283
Method for manufacturing silicon carbide semiconductor device
Abstract:
Provided is a method for manufacturing a silicon carbide semiconductor device which is capable of obtaining the silicon carbide semiconductor device having a high forward current and a low reverse leakage current by a simple method. The method for manufacturing a silicon carbide semiconductor device includes the steps of: forming a film made of a first electrode material on one surface of a silicon carbide substrate, and forming an ohmic electrode by performing heat treatment at a temperature range of 930 to 950° C.; and forming a film made of a second electrode material on the other surface of the silicon carbide substrate, and forming a Schottky electrode by performing heat treatment.
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