Invention Grant
- Patent Title: Method for manufacturing silicon carbide semiconductor device
- Patent Title (中): 碳化硅半导体器件的制造方法
-
Application No.: US13142147Application Date: 2009-10-26
-
Publication No.: US08404574B2Publication Date: 2013-03-26
- Inventor: Takashi Masuda
- Applicant: Takashi Masuda
- Applicant Address: JP Tokyo
- Assignee: Showa Denko K.K.
- Current Assignee: Showa Denko K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-333659 20081226
- International Application: PCT/JP2009/005645 WO 20091026
- International Announcement: WO2010/073455 WO 20100701
- Main IPC: H01L21/283
- IPC: H01L21/283

Abstract:
Provided is a method for manufacturing a silicon carbide semiconductor device which is capable of obtaining the silicon carbide semiconductor device having a high forward current and a low reverse leakage current by a simple method. The method for manufacturing a silicon carbide semiconductor device includes the steps of: forming a film made of a first electrode material on one surface of a silicon carbide substrate, and forming an ohmic electrode by performing heat treatment at a temperature range of 930 to 950° C.; and forming a film made of a second electrode material on the other surface of the silicon carbide substrate, and forming a Schottky electrode by performing heat treatment.
Public/Granted literature
- US20110256699A1 METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE Public/Granted day:2011-10-20
Information query
IPC分类: