Invention Grant
- Patent Title: Preventing breakage of long metal signal conductors on semiconductor substrates
- Patent Title (中): 防止半导体基板上的长金属信号导体断裂
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Application No.: US13135510Application Date: 2011-07-07
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Publication No.: US08404585B2Publication Date: 2013-03-26
- Inventor: Robert O. Conn
- Applicant: Robert O. Conn
- Applicant Address: US NC Research Triangle Park
- Assignee: Research Triangle Institute
- Current Assignee: Research Triangle Institute
- Current Assignee Address: US NC Research Triangle Park
- Agency: Imperium Patent Works
- Agent Zheng Jin; Darien K. Wallace
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
An apparatus includes a volume of insulator disposed over a top surface of a semiconductor substrate, a tube of soft dielectric, and a metal conductor. The insulator has a hardness of more than approximately three gigaPascals (gPa) and the soft dielectric has a hardness of less than three gPa. The tube of soft dielectric and the metal conductor are both embedded within the volume of insulator. The tube defines a central volume and the metal conductor extends in a direction through the central volume for a distance of at least one inch. The metal conductor is encircled by the soft dielectric when the apparatus is viewed in a cross-sectional plane perpendicular to the direction. The metal conductor may include a plurality of bend portions. The metal conductor does not break when the apparatus is temperature cycled over a range from zero to eighty five degrees Celsius.
Public/Granted literature
- US20110266034A1 Preventing breakage of long metal signal conductors on semiconductor substrates Public/Granted day:2011-11-03
Information query
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