Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and method for manufacturing same
- Patent Title (中): 非易失性半导体存储器件及其制造方法
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Application No.: US12875678Application Date: 2010-09-03
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Publication No.: US08405141B2Publication Date: 2013-03-26
- Inventor: Toru Matsuda , Kazuyuki Higashi
- Applicant: Toru Matsuda , Kazuyuki Higashi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-013372 20100125
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, a stacked body, an insulating film, a non-doped semiconductor film, a semiconductor pillar, a charge storage film, a contact, and a spacer insulating film. The stacked body is provided on the substrate. The stacked body includes a plurality of doped semiconductor films stacked. The insulating film is provided between the doped semiconductor films in a first region. The non-doped semiconductor film is provided between the doped semiconductor films in a second region. The semiconductor pillar pierces the stacked body in a stacking direction of the stacked body in the first region. The charge storage film is provided between the doped semiconductor film and the semiconductor pillar. The contact pierces the stacked body in the stacking direction in the second region. The spacer insulating film is provided around the contact.
Public/Granted literature
- US20110180866A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2011-07-28
Information query
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