Invention Grant
US08405190B2 Component having a silicon carbide coated via 有权
具有碳化硅涂层通孔的部件

Component having a silicon carbide coated via
Abstract:
A component including a via for electrical connection between a first and a second plane of a substrate is provided. The substrate has a borehole having an inner wall that is coated with a conductive layer made of an electrically conductive material, an intermediate layer being disposed between the inner wall and the conductive layer. The intermediate layer includes electrically insulating SiC.
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