Invention Grant
- Patent Title: Objective-optical-system positioning apparatus and examination apparatus
- Patent Title (中): 物镜光学定位装置及检查装置
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Application No.: US12790112Application Date: 2010-05-28
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Publication No.: US08405903B2Publication Date: 2013-03-26
- Inventor: Tadashi Hirata , Masahiro Oba
- Applicant: Tadashi Hirata , Masahiro Oba
- Applicant Address: JP Tokyo
- Assignee: Olympus Corporation
- Current Assignee: Olympus Corporation
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz, Goodman & Chick, P.C.
- Priority: JP2009-133449 20090602
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/02

Abstract:
An objective-optical-system positioning apparatus includes a positioning unit interposed between an objective optical system having a small-diameter end section and an examination optical system for examining light collected by the objective optical system; and a substantially cylindrical support unit, one end of which is secured to an organism, and which internally supports the small-diameter end section in a detachable manner. The positioning unit includes a holding part for holding the objective optical system and a moving mechanism supporting the holding part such that the holding part is freely movable in a direction intersecting with a direction of an optical axis of the objective optical system, and the other end of the support unit has a tapered inner surface whose diameter gradually increases toward the tip.
Public/Granted literature
- US20100309547A1 OBJECTIVE-OPTICAL-SYSTEM POSITIONING APPARATUS AND EXAMINATION APPARATUS Public/Granted day:2010-12-09
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