A lens array is formed on one surface of a deposition donor substrate and a light absorption layer is formed on the other surface; a material layer is formed in contact with the light absorption layer; the surface of the deposition donor substrate on which the material layer is formed and a deposition target surface of a deposition target substrate are disposed to face each other; and at least part of the light absorption layer is selectively irradiated with light from the side of the deposition donor substrate, on which the lens array is provided, to heat the material layer in a region overlapped by the region irradiated with the light in the light absorption layer, thereby performing deposition to the deposition target surface of the deposition target substrate.